LASER TRAPPING MICRO-PROBE FOR NANO-CMM

T. Miyoshi, Y. Takaya, S. Takahashi

Abstract

Nano-CMM is required to evaluate tolerance and dimension of the component parts of micromachines by coordinate measurement of submillimeters size 3-D shapes. This paper discusses a micro-probe technique for the nano-CMM, the so-called laser trapping micro-probe. The principle to detect a three dimensional position is based on the nature of an optically trapped particle and interferometer method. An optically trapped silica particle in air is used as a micro-probe sphere. Practical positional detection method is established based on experimental analysis of fringe intensity changes while a probe sphere is approaching to a workpiece. Measurements of a glass microsphere used as particle size standards is demonstrated to verify the validity of the laser trapping micro-probe. Measurement results show that the laser trapping probe has a possibility to measure submillimeters size 3-D shapes of such as microparts.

Keywords

microparts, laser trapping, nano-CMM probe

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IMEKO-WC-2000-TC2-P045.pdf

DOI

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IMEKO TC

TC2 - Photonics

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