APPLICATIONS OF SHORT COHERENCE INTERFEROMETRY

T. Pohl, B. Schmitz

Abstract

A measuring principle for the determination of absolute distance and thickness values is proposed. Based on the combination of laser interferometry (Michelson type) and Doppler technique the new developed devices include laser sources showing a short coherence length. This contributions aims to describe some preliminary experiments and to point out some of the main advantages of short coherence interferometry, their non-destructive and non-contact behaviour and the possibilities for self-calibration. The measurement results are mainly independent of the objects´ position and movement. Finally, two relevant problems will illustrate the industrial applicability: the determination of thickness of metal sheets in manufacturing control and the thickness of transparent objects.

Keywords

optical metrology, interferometry

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IMEKO-WC-2000-TC2-P049.pdf

DOI

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IMEKO TC

TC2 - Photonics

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