MICROLASER DISPLACEMENTMETER

S. Sakano

Abstract

An extremely small optical displacement sensor using a laser diode integrated with a microlens and based on the composite cavity principle was constructed. The microlaser displacementmeter has been developed using this optical sensor. The measuring resolution of the displacement is less than 0.01 µm and it can detect very low velocities of less than 5 µm/s. The optical sensor is very small, 800 µm × 900 µm. The microlaser displacementmeter shows good linearity between relative displacement and output signal.

Keywords

optical micro system, microlaser, displacementmeter

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IMEKO-WC-2000-TC2-P052.pdf

DOI

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IMEKO TC

TC2 - Photonics

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