INDUCTIVE SENSORS IN THICK FILM TECHNOLOGIES

D. Marioli, E. Sardini, A. Taroni

Abstract

The paper presents two thick film inductive sensors having different configuration: the first is a planar spiral while the second one consists of multi-layer spirals. The paper describes how the two sensors have been made, the materials used and their geometric configurations in order to optimize their metrological performances. The spatial distribution of the magnetic field generated by the two sensors has been simulated, while their impedance, the series-equivalent circuit parameters, as well as their sensitivity to temperature variation have been measured in the laboratory. Moreover the multi-layer sensor has been tested in the measurement of a metallic object profile. A processing electronics based on a synchronous demodulation technique extracts the inductance variation induced by the changing of the profile height. A preliminary test, cross calibrated with an optical system, shows an height resolution less than 10 µm and a lateral resolution less than 2 mm.

Keywords

inductive sensor, thick film, profile measurement

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IMEKO-WC-2000-TC4-P146.pdf

DOI

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IMEKO TC

TC4 - Measurement of Electrical Quantities

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