DEVELOPMENT OF CALIBRATION METHODS FOR THE NANOINDENTATION TEST

K. Herrmann, K. Hasche, F. Pohlenz, R. Seemann

Abstract

The nanoindentation method increasingly gains in importance for the determination of the mechanical properties of thin layers. Comparisons carried out in the field of the nanoindentation method reveal, however, significant deficits in calibration. The paper presents investigation results for the calibration of the essential quantities influencing the uncertainty of measurement. They chiefly comprise the geometrical deviations of the indenter, the depth and the force measuring system, the measuring deviation of zero point of the depth measurement and the compliance of the measuring device.

Keywords

nanoindentation, calibration, hardness

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IMEKO-WC-2000-TC5-P169.pdf

DOI

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IMEKO TC

TC5 - Hardness Measurement

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