CONSIDERATIONS ON NANOHARDNESS MEASUREMENT

Z. Rymuza, M. Misiak, J. T. Wyrobek

Abstract

Measurement of hardness on nano-scale is discussed. Methods and instruments used are described and energy definition of hardness is introduced. Results of nanohardness measurements of materials, in particular ultrathin films,used in Micro Electro Mechanical Systems (MEMS) technology are presented.

Keywords

hardness, nanohardness measurement, MEMS materials

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IMEKO-WC-2000-TC5-P171.pdf

DOI

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IMEKO TC

TC5 - Hardness Measurement

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