MICROMACHINED SEMICONDUCTOR FLOW SENSOR

F. Kohl, R. Fasching, A. Glaninger, R. Chabicovsky, A. Jachimowicz, G. Urban

Abstract

Miniaturized flow sensors based on thin film germanium thermistors offer high flow sensitivities and short response times. The thermistors are placed on a silicon nitride diaphragm carried by a silicon frame. Using the controlled overtemperature scheme the measurable airflow velocity ranges from 0.001 m/s to 200 m/s. The response time to large step changes of the air velocity is less than 20 ms. Our experiments show that the sensor is also applicable to acoustic flow measurements.

Keywords

electrocalorimetric flow measurement, thin film germanium thermistors, micromachined flow sensor

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IMEKO-WC-2000-TC9-P238.pdf

DOI

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IMEKO TC

TC9 - Flow Measurement

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