SCANNING CALORIMETRY IN GAS DISCHARGE PLASMAS

A. N. Magunov

Abstract

The scanning mode of calorimetry in plasmas is developed to study both kinetic and energetic characteristics of surface chemical reactions and catalytical processes which result in heat release at the surface under plasma exposure. The main goal of scanning calorimetry in plasmas is to determine separately a contribution of each kind of heat transfer to the total heat flux from a plasma to a surface. A heat of reaction of plasma chemical etching the silicon single crystal is measured experimentally by comparison of temperature dependencies of heating rate for two calorimeters having different surface properties.

Keywords

plasma surface interaction, transient temperature, heat of reaction

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IMEKO-WC-2000-TC12-P309.pdf

DOI

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IMEKO TC

TC12 - Temperature and Thermal Measurements

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