NANO-PROBE USING OPTICAL SENSING

K. Enami, M. Hiraki, K. Takamasu

Abstract

Nano-Probe System is described in this paper. Recently industrial parts have been smaller in size of sub-micrometer order. Therefore it is needed to measure such small mechanical parts in high accuracy. For this purpose we have developed nano-CMM(Coordinate Measuring Machine), whose resolution is nano-meter order. We are now developing a probe attached to nano-CMM, which is named nanop- Probe. It must be small enough and be able to detect touch of an object with high sensitivity. As a principle of nano-Probe system, we have proposed Optical Sensing System, new system that can detect displace of a metal ball and carried out basic experiment. We are making prototype. Experiment that inspects availability of Optical Sensing System is done.

Keywords

Coordinate Measuring Machine, probe, three dimensional nanometer measurement

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IMEKO-WC-2000-TC14-P366.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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