SCATTEROMETRY OF MACHINED SURFACES

C. Lukianowicz, T. Karpinski

Abstract

Measurements of surface roughness by scattering methods are the subjects of this paper. Theoretical and experimental studies of the light scattering from machined surfaces are presented. Two-dimensional fast Fourier transform (2-D FFT) algorithm for computer simulation of diffraction field is applied. A discussion of modelling scattered light from periodical and random surfaces is given as well. Survey of scattering methods for measuring of rough machined surfaces is concise presented. A description of method for evaluation of moving rough surface is also given. This method involves measurements of the angular distribution of scattered light. Experimental results of measurements of machined rough surfaces are presented. These results show applicability of this method in process control.

Keywords

scatterometry, measurements of surface roughness

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IMEKO-WC-2000-TC14-P383.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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