SOME SHAPE MEASUREMENT PROBLEMS OF MICRODETAILS

T. Miller

Abstract

Last years the scale of microsystems production is higher and higher. Because of this fact the requirements for traditional measurement equipment applied for measurement and control of microdetails geometry are changing. These changes are connected with new needs in the range of measurement and programme possibilities. In the paper the examples of microdetails measurements carried out using PG-2/200 Form Meter, which was worked out and produced at the Institute of Metal Cutting are presented. The analysis of measured microdetail profiles contains linear dimensions, angles and radii. The examples of measurement accuracy analysis carried out using PG-2/200 Form Meter for standard details are also presented. The aim of this analysis is to define the range of traditional form meters application in small surface geometry measurements.

Keywords

shape measurements, dimensional inspection, 3D surface topography

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IMEKO-WC-2000-TC14-P385.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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