STANDARDLESS PROFILE MEASUREMENT ALONG CIRCLES

S. Sonozaki, K. Iwata, Y. Iwahashi

Abstract

In this paper, profiles along concentric circles on two precise mirrors are measured by using a Fizeau-interferometer with no standard. For the measurements, spacing between the two flat mirrors is measured with the interferometer at the angles of every 5 degrees along the circles. With these data, profiles are calculated using the Fourier transformation method and linear equation method. Profiles along ten concentric circles are calculated from the data although the mean plane of each profile is different. Discussion is made on the calculation of two-dimensional surface profiles along the different concentric mean planes. The results of the profiles calculated using different number of the data are compared with each other to show their respective features.

Keywords

surface profile, profile measurement, precise mirror, interferometer

Download

IMEKO-WC-2000-TC14-P404.pdf

DOI

-

IMEKO TC

TC14 - Measurement of Geometrical Quantities

Back to the proceedings