NEW APPROACH IN INTERFEROMETRIC LENGTH MEASUREMENTS

A. Titov, I. Malinovsky, C. A. Massone

Abstract

Interferometric length measurements without parallax error, based on the phenomenon of the reproducible wringing, are demonstrated. Using reproducible wringing together with the slave-block technique, accuracy level below 1 nm can be obtained for blocks of a few mm length with small flatness deviation. Phase change correction determination with sub-nm uncertainty is achieved for blocks up to 100 mm. Comparing the results of the double-ended method on a transparent reference plate with the reproducible wringing results, measurements without parallax error can be performed in the general case with a nm uncertainty.

Keywords

meter realization, gauge block, Abbe error, uncertainty, interferometry

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IMEKO-WC-2000-TC14-P406.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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