SURFACE TOPOGRAPHY REPRESENTATION IN PROFILOMETRY

M. Wieczorowski, A. Cellary, J. Chajda

Abstract

In the paper the authors presented a comparison analysis of three different probes used for surface topography measurement. Skid and skidless stylus probes were used as contact pick-ups, while an optical autofocussing pick-up was applied as a non-contact one. The analysis was performed using several different topography parameters. It showed that a skid causes some relatively small distortions as far as the surface representation is concerned. The optical probe on the other hand proved to be a very difficult measuring tool, particularly for surfaces with steep slopes and sharp edges. Yet even for very smooth surfaces a great attention must be paid while measuring with this kind of pick-up is considered.

Keywords

surface topography, profilometry, probes

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IMEKO-WC-2000-TC14-P409.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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