NANOMETROLOGY USING X-RAY INTERFEROMETRY

D. G. Chetwynd, N. O. Krylova

Abstract

X-ray interferometers are now a recognized tool for sub-nanometre precision metrology in National Standards Laboratories. Used in slightly different ways, they have potential for wider application as the demands for greater precision in industrial metrology increase. After reviewing some of the key ideas about using monolithic devices in this manner, it is shown that a ‘portable’ system intended for industrial standards rooms can perform well. There is a brief discussion of some issues such as vibration isolation. Details are given of a novel experimental verification that a separated-blade interferometer could operate on a state-of-the-art kinematic slideway, although for reasons of cost, a full implementation has not been attempted. An interferometer to measure angular displacements to nanoradian precisions is demonstrated. Finally, there are a few comments on where the technology is likely to develop.

Keywords

X-ray interferometry, nanometre metrology, calibration

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IMEKO-WC-2000-MNT-P481.pdf

DOI

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