BROADBAND ULTRASONIC MEMS FOR LIQUIDS

H. Daßler, L. Thieme, W. Manthey

Abstract

Micromachined ultrasonic transducer arrays were developed to pan a sound beam electronically in an arbitrary direction. These PVDF-based transducer arrays are suitable for applications in liquids. The characterisation of these transducers is done by acoustical and laseroptical measurements. The single transducer element dimensions varies from 20 to 100 µm for the generated high frequencies up to 20 MHz. The knowledge of the transducer behaviour based on acoustical and laseroptical characterisation of the transducer arrays results in a improved transducer layout. A modified micromechanical realisation is presented. The advantages of these transducer arrays for the well known transit-time fluid flow measurement are described and the applicability for the beam deflection method in liquids is discussed.

Keywords

ultrasonic array, micro technology, fluid flow measurement

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IMEKO-WC-2000-MNT-P482.pdf

DOI

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