ANALYSIS OF AFFECT FACTORS OF NANO SCANNING IMAGES

L. Si, P. H. Osanna, N. M. Durakbasa

Abstract

The imaging results of a group of experiments concerned with imaging two ultraprecise fabricated samples composed of Cu- and Al-alloies as well as silicon coated with C-N ion-beams in 1 µm scan range, have been analysed and discussed. The sources of SPM (Scanning Probe Micoscope) artifacts and the affect factors of the SPM images are presented and investigated. It is concluded that so many scanning images looking like “atoms” topography structure obtained have been misunderstood in the world, because it is very difficult to correctly and properly in terpret so many kinds of SPM artifacts in the imaging practice applications.

Keywords

image topography, SPM artifacts, micro and nano structure, micro and nano technology

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IMEKO-WC-2000-MNT-P488.pdf

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