MEMS METROLOGY USING A STROBED INTERFEROMETRIC SYSTEM

Erik Novak, Der-Shen Wan, Paul Unruh, Michael Schurig

Abstract

Accurate measurements of MEMS surfaces, geometries and motions are crucial to achieving the desired performance of the devices. The wide variety of MEMS devices in development and production requires very flexible metrology for single-platform characterization. In addition to having greatly varying geometries, devices must also be characterized statically and under actuation.
White-light interferometry, fortunately, is a technique flexible and accurate enough to meet MEMS metrology needs. This high-speed, non-contact measurement method allows both large lateral and vertical ranges with nanometer-level vertical resolution and positional accuracy. When standard illumination is complemented with strobed light, dynamic measurements of MEMS can also be carried out.
This paper presents some of the hardware and software design considerations for producing a single metrology platform with the required flexibility for production MEMS metrology. Several static and dynamic MEMS measurements are presented to illustrate the design requirements.

Keywords

interferometer, surface metrology, profilometry, MEMS, white-light scanning, phase-shifting

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PWC-2003-TC2-008.pdf

DOI

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IMEKO TC

TC2 - Photonics

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