EVALUATION OF PROPERTIES OF NANO-CMM BY THERMAL DRIFT AND TILT ANGLE

Masanao Fujiwara, Kiyoshi Takamasu, Shigeo Ozono

Abstract

We have started developing novel systems and key technology as “Nano-CMM project”. In this project, our intention is developing the CMM with nano meter resolution to measure three-dimensional positions, orientations and parameters of three-dimensional features. For developing Nano-CMM, we evaluate properties of stages for Nano-CMM by thermal drift and tilt angles. In this report, the thermal drift and tilt angles of stages of Nano-CMM were evaluated. Then we made the new prototype of Nano-CMM made of low thermal expansion iron steel to reduce the influence of thermal drift and we also propose new construction of Nano-CMM for reducing the effect by tilt angles.

Keywords

CMM (coordinate measuring machine), nano meter measurement, thermal drift

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PWC-2003-TC14-007.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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