NANOMETROLOGY REGIME IN LENGTH MEASUREMENTS OF MATERIAL ARTEFACTS WITH NOMINAL LENGTHS UP TO 100 mm

A. Titov, I. Malinovsky, C.A. Massone

Abstract

New calibrated double-sided method of interferometric length measurements with quartz reference plate is reported. The method is free from wringing errors, and can be used for the improvement of measurements of material artefacts. Limitations of the interferometric measurements are discussed. Some systematic errors are measured with a sub-nanometer resolution.

Keywords: gauge block, interferometry, nanometrology
Download: PWC-2003-TC14-022.pdf
DOI: -
IMEKO TC: TC14 - Measurement of Geometrical Quantities

Event details

Event: XVII IMEKO World Congress
Place: Dubrovnik, CROATIA
Time: 22 June 2003 - 28 June 2003
Website: http://www.hmd.hr/imeko/

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