DISPLACEMENT MEASURING SENSOR CALIBRATION USING NONLINEARITY FREE LASER INTERFEROMETER

TaeBong Eom, JaeWan Kim

Abstract

For calibration of displacement measuring sensors with sub-nanometer resolution, a novel calibration system using laser interferometer was developed. It is directly traceably to the Meter and portable due to use of laser coupled by an optical fiber. And also it has a higher accuracy because of nonlinearity free laser interferometer and compact design. The detailed system and one example of calibration are described. Finally a detailed uncertainty budget is described.

Keywords

nanosensor, nonlinearity, laser interferometer

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PWC-2003-TC14-028.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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