HARD- AND SOFTWARE INTERFACES ENABLING EFFICIENT INSPECTION PLANNING AT THE NANO POSITIONING AND NANO MEASURING MACHINE (NPM)

Susanne Töpfer, Gerhard Linss, Uwe Nehse

Abstract

The large number of inspection features at dimensional measurements in the nano range entails a need for a lossless information flow along the process chain. Within the frame of fundamental research the concept of the closed process chain is adapted to the utilization at the NPM. Thereby, novel principles of knowledge distribution and novel inspection strategies are investigated. The latter focuses on the goal-oriented combination of overlapping measuring ranges of different scale of different sensors. In this regard the required sensor adaptability is also analysed. The paper deals with the hard- and software interfaces necessary to realize the closed process chain philosophy at the NPM. As external, neutral open interface the I++/DME (dimensional measuring equipment) interface is used. It supports the widespread and flexible use of the NPM for local as well as for remote operators. Furthermore, it provides the direct link to standard analysis and offline programming software and thus indirectly to CAD software. The presented research enables the efficient inspection planning and its automatic execution at the NPM. This approach drives the metamorphosis of the NPM from a scientific research machine towards a nano coordinate measuring machine interesting to other research areas and to industry.

Keywords

inspection planning, adaptive sensors, neutral open interface

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IMEKO-TC7-2004-060.pdf

DOI

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IMEKO TC

TC7 - Measurement Science

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