STEP-GAUGE CALIBRATION USING AN INTERFEROMETRIC COORDINATE MEASURING MACHINE AND THE UNCERTAINTY

Sonko Osawa, Toshiyuki Takatsuji, Tomizo Kurosawa

Abstract

There are many kinds of geometrical gauges used for calibration of machine tools and coordinate measuring machines (CMMs). A step-gauge is a kind of calibration gauge. It consists of many short gauge blocks and a base bar. Gauge blocks were directly calibrated by an interferometer using method of exact fraction. The method, however, does not apply to the calibration of step-gauges because of their complicated structure. The calibration works are very important missions in national metrology institutes (NMIs). We developed the step-gauge calibration system that consisted of a CMM and an interferometer. We describe the system scheme of a step-gauge calibration system using a conventional CMM combined with an interferometer and the evaluation of the measurement uncertainty. The uncertainty in measurement using this system is about 0.5 µm (<i>k</i> = 2) for 1-meter measurement.

Keywords

step-gauge calibration, uncertainty, Coordinate measuring machine, traceability

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PWC-2003-TC14-033.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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