Electromechanical characterizations of MEMS based energy harvesters by harmonic sampling analysis method

Alexandre Bounouh, Denis Bélières

Abstract

This paper presents a new and accurate experimental method based on electrical harmonic distortion analysis to determine mechanical characteristics (resonant frequency) of MEMS devices used in widespread applications as in energy scavenging, cantilever-based microsystems for gas sensing and atomic force microscopy or in any kind of MEMS resonators. Resonant frequencies ranging from 0.8 kHz to 5 kHz of electrostatic actuated MEMS-based harvesters have been measured by this technique with an uncertainty as low as a few parts in 10³ constituting an outstanding result compared to the other methods.

Keywords

MEMS, resonant frequency, damping factor, Distortion analysis, sampling measurement

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DOI

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IMEKO TC

TC4 - Measurement of Electrical Quantities

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