PHOTOACOUSTIC TRANSMITTANCE MEASURMENT FOR LARGE DIAMETER LENS IN ULTRAVIOLET RAYS (193 nm)

Hiromitsu Tsutsu, Ichirou Ishimaru, Fumikazu Oohira, Kenji Hirata, Fumio Sirai

Abstract

The purpose of this study is establishment of the high precision transmittance measurement technology (accuracy: 0.01%) of the large diameter lens(material: CaF₂, diameter: 200mm) for ultraviolet rays (wavelength: 193 nm). Transmittance measurement method with photoacoustic spectroscopy is proposed. This technology depends on only photothermal spectroscopy at a local minute area and is independent of lens size. So this proposed method can be applied to large diameter lens. And measurment time at one point is extremely short. So the superiority of this new method is that the transmittance distribution in-plane can be easily measured.It was experimentally verified that this photoacoustic spectroscopy could be applicable to large diameter lens.

Keywords

Photo Acoustic Spectroscopy, Calorimetric measurement, Photothermal effect

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PWC-2003-TC2-013.pdf

DOI

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IMEKO TC

TC2 - Photonics

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