Precise Shape Measurement Method Using Scattered Light

Katuhisa Saito, Susumu Sakano

Abstract

It is shown in the paper that the shape and the contour of the objects can be detected high-precisely using the scattered light. The simulation of the scattered light using the simulation software at first pursues the possibility of the high precise measurement. The possibility of the high-precise measurement is confirmed in the simulation. The simulation results are verified by the experiments next. It is shown that the precise micron meter order measurement is possible using the scattered light from the results of the simulation and the experiment. The method is applied to the inspection of the end shape on the polishing process of the optical fiber and the practicability of the method is confirmed. This method presets the industrial applications like the measurement of the shape of the products.

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IMEKO-TC4-2005-010.pdf

DOI

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IMEKO TC

TC4 - Measurement of Electrical Quantities

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