DEVELOPMENT OF A GAS MICRO FLOW TRANSFER STANDARD

J. Barbe, F. Boineau, F. Dijoux, T. Macé, P. Otal

Abstract

LNE has ability to calibrate micro gas flow rates using the dilution method in the range from 2 μg/s to 20 μg/s of nitrogen or 0.75 μg/s to 30 μg/s of helium. In addition, a primary constant pressure flowmeter for leak rates measuring from 0.05 μg/s to 35 μg/s is also available. In order to compare these reference facilities and to validate the dilution method below 30 μg/s LNE is developing a micro flow transfer standard (μFTS) with the collaboration of ATEQ France, manufacturer of control equipment for leak test. The flowmeter consists mainly of an array of three stainless steel capillaries designed to cover the ranges from 0.035 μg/s to 0.35 μg/s 0.35 to 3.5 μg/s and 3.5 to 35 μg/s of nitrogen (0.01 ml/h to 100 ml/h). A dynamic model of the mFTS determines the mass flow rate from the input presure, the differential pressure of the capillary, the gas temperature, the gas properties (viscosity and density) and the dimensional parameters of the capillary (length and radius). The comparison of both reference methods was carried out with the MFTS from 0.35 μg/s to 35 μg/s

Keywords

gas micro flow, transfer standard, dilution method

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IMEKO TC

TC9 - Flow Measurement

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