MEMS THERMAL MASS FLOW METERS FOR HUMIDIFIED GASES

L. J. Huang, C. C. Chen Y. N. Liu, J. L. Ruan, W. H. Deng

Abstract

Measurement of gas with high humidity or gas converted from liquid phase is frequently encountered. Accurate metering is always a challenging process as the remaining liquid vapors may significantly affect the performance of the measuring unit. In this paper, we presented a novel design of a mass flow meter which is utilizing a single MEMS calorimetric mass flow sensor chip integrated with a substrate micro-heating circuitry. The results indicated that the design can effectively work for the gas flow measurement under the presence of high humidity or liquid vapors with no requirement of additional external heating assistance to avoid condensation that alternates the measurement results. The present meter calibration, tests and applications will be also discussed.

Keywords

MEMS thermal mass flow meters, humidified gases, gas

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IMEKO-TC9-2013-080.pdf

DOI

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IMEKO TC

TC9 - Flow Measurement

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