A NEW APPROACH TO IN-SITU FORMTEST-INTERFEROMETRY

D. Doerner, A. Bai, P. Mangalasseril, T. Pfeifer

Abstract

Interferometry is a common method for testing the form of ultra-precise components. However interferometrical measurements are very sensitive to external influences. Due to this reason, in-situ measurements are very difficult to perform, especially in the vicinity of production processes. In this paper we present a new concept for the integration of interferometers in a machine tool and first results of the analysis of fundamental influences on interferometers operated in-situ.

Keywords

interferometry, in-situ measurement, simulation

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PWC-2003-TC2-017.pdf

DOI

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IMEKO TC

TC2 - Photonics

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