3D OPTICAL MEASURING TECHNOLOGIES FOR SCIENTIFIC AND INDUSTRIAL APPLICATIONS

S. N. Makarov, S. V. Plotnikov, E. V. Sysoev, A. G. Verkhogliad, P. S. Zav’yalov, Yu. V. Chugui, A. V. Latyshev, E. S. Senchenko

Abstract

Solving many actual safety problems in science, atomic, optics-mechanical and railway industry takes 3D optical measuring technologies with micro-/ nanometer resolution and productivity from 100 to 10<sup>5</sup> meas./s. The novel results of the R & D activity of TDI SIE SB RAS in this field are presented.

Download: IMEKO-TC14-2011-02.pdf
DOI: -
IMEKO TC: TC14 - Measurement of Geometrical Quantities

Event details

Event: TC14 LMPMI Symposium 2011
Technical Committee: TC14
Place: Braunschweig, GERMANY
Time: 12 September 2011 - 14 September 2011
Website: http://www.lasermetrology2011.com

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