FIBER-COUPLED MICROOPTCAL INTERFEROMETRIC SENSOR FOR PRECISION ENGINEERING APPLICATIONS

Peter Lehmann, Markus Schulz

Abstract

Industrial inspection of precision manufactured mechanical or optical components requires flexible, accurate, fast and reasonably priced optical sensors. We present a combination of interferometric and confocal sensor based on a fiber-coupled micro-optical probe. Owing to its micro-optical realization, its low mass, and the high data rate the probe head of the sensor can be used for very fast surface contour tracking.

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IMEKO-TC14-2011-03.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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