FIBER PROBE WITH INTERFEROMETRIC Z-MEASUREMENT

Sabine Linz, Alexander Schöch, Carlo Bach, Andreas Ettemeyer, Buchs, Switzerland, Benjamin Hopp, Matthias Andräs

Abstract

Increasing manufacturing accuracy requirements enforce the development of innovative and highly sensitive measuring tools. The recent introduction of optical fiber probes combined classical tactile measurement methods with optical read out and reaches measurement uncertainties as small as 0.1 micrometers. In this paper we describe an innovative way to measure the <i>z</i>-position of the fiber tip itself with high accuracy by using interferometry.

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DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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