SPECTRAL INTERFEROMETRY WITH LATERAL CHROMATIC ENCODING
Abstract
In this paper, a new single-shot line sensor based on Fourier-domain spectral interferometry is presented. Each point of the sampled line is encoded by a different wavelength obtained by a chromatic dispersion at a grating. The requested height profile of the line is determined by combining a phase detection algorithm with an appropriate model-based approach. The robustness of this algorithm with respect to errors in the initial condition is analyzed before the final presentation of a measurement result.
Event details
- Event
- TC14 LMPMI Symposium 2011
- Technical Committee
- TC14
- Place
- Braunschweig, GERMANY
- Time
- 12 September 2011 - 14 September 2011
- Website
- http://www.lasermetrology2011.com