COMPARISON OF A SCANNING INTERFEROMETRIC PROFILE MEASUREMENT METHOD AND AN ULTRA-PRECISE COORDINATE MEASURING MACHINE
Abstract
Comparative profile measurements of a testspecimen with a diameter of 150 mm and a peak-to-valley height of 50 µm carried out by an ultra-precise coordinate measuring machine (Panasonic UA3P) and a highly accurate scanning interferometric multi-sensor instrument (ETMS) are presented. The instruments and their principles are described. Although the measurement principles of the instruments are different, the measurements agree within the claimed uncertainties. The rms-difference of the measurement results is less than 20 nm.
Event details
- Event
- TC14 LMPMI Symposium 2011
- Technical Committee
- TC14
- Place
- Braunschweig, GERMANY
- Time
- 12 September 2011 - 14 September 2011
- Website
- http://www.lasermetrology2011.com