CRYSTALLINE SURFACES FOR LASER METROLOGY

A.V. Latyshev

Abstract

The number of methodological recommendations has been pronounced to describe correctly low-dimensional structures up to atomic resolution and to fabricate crystalline surfaces for applicability in nanoscale metrology. Technology of an extremely flat mirror for optical and laser metrology has been demonstrated on the base of crystalline surface. Stepped crystalline surface with controlled steps distribution is a precise calibrator at nanoscale measurements which is suitable for high-resolution techniques. The precision of measurements performed by atomic-force microscopy (AFM) and high-resolution electron microscopy (HREM) for solving problems of metrology and diagnostics of solid nanostructures is discussed.

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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