HIGH PRECISION DIMENSIONAL METROLOGY OF PERIODIC NANOSTRUCTURES USING LASER SCATTEROMETRY

B. Bodermann, S. Bonifer, E. Buhr, A. Diener, M. Wurm

Abstract

At PTB different laser scatterometers with partly novel and outstanding metrological capabilities have been developed and are available for high-resolution dimensional metrology of periodic nanostructures. Two different systems are described and their metrological potential discussed: a laser diffractometer for pitch calibration and a versatile goniometric scatterometer for multi-parameter characterisation of nanostructures.

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IMEKO-TC14-2011-29.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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