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STABILITY OF A FIBER-FED HETERODYNE INTERFEROMETER

Christoph Weichert, Jens Flügge, Paul Köchert, Rainer Köning, Rainer Tutsch

Abstract

A heterodyne interferometer with spatially separated input beams is presented. The optical design realizes symmetric paths through glass and air, which results in a minimal dead path. An automatic correction of phase variations introduced by feeding the optics with fibers and by angle variations between the optics and the mirror is demonstrated. In addition to the resolution and linearity in the single digit picometer range, the long-term stability of the interferometer setup is investigated, involving the previous analysis of all different components of the setup. It is shown, that the long-term stability is still limited by the variations of the environmental conditions.

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IMEKO-TC14-2011-33.pdf
DOI
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IMEKO TC
TC14 - Measurement of Geometrical Quantities

Event details

Event
TC14 LMPMI Symposium 2011
Technical Committee
TC14
Place
Braunschweig, GERMANY
Time
12 September 2011 - 14 September 2011
Website
http://www.lasermetrology2011.com

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