INTERFEROMETRIC MEASURING SYSTEMS OF NANOPOSITIONING AND NANOMEASURING MACHINES

T. Hausotte, B. Percle, N. Vorbringer-Dorozhovets, H. Baitinger, F. Balzer, U. Gerhardt, E. Manske, G. Jäger, D. Dontsov

Abstract

The Nanopositioning and Nanomeasuring Machine (NMM-1) developed at the Ilmenau University of Technology is equipped with three homodyne plane-mirror miniature interferometers for the measurement of the displacement of a movable corner mirror. The object being measured is placed on the corner mirror, which is positioned by a three-axis drive system. The probing system and the plane-mirror miniature interferometers are fixed on a metrology frame made of Zerodur®. Depending on the selected probing system, the machine is capable of carrying out both 2½D surface scans and 3D coordinate measurements. In this way objects can be measured or scanned in volumes up to 25 mm × 25 mm × 5 mm with nanometre precision using various optical and tactile probe systems.

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DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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