NEW DEVELOPMENTS OF MEASUREMENT STANDARDS AND PROCEDURES FOR MICRO AND NANOMETROLOGY AT THE PTB

Ulrich Neuschaefer-Rube, Michael Neugebauer, Thorsten Dziomba, Hans-Ulrich Danzebrink, Ludger Koenders, Harald Bosse

Abstract

The contribution provides an overview on new developments of standards and measurement methods for 3D-micro- and nanometrology with a focus on recent work at the PTB. These developmentstarget at a reduction of measurement uncertainty of instruments used for dimensional characterization of micro- and nanostructures. The developments in 3D-micrometrology will focus on standards for calibration of micro-CMM, for dimensional micro-CT instrumentation and for microcontour measurement. For different applications in nanometrology calibration standards for unidirectional measurands like 1D-, 2D- and 3D-position as well as step height and for bidirectional measurands like linewidth or diameter will be described. In addition the potential to make use of crystalline lattice structuresto provide traceability for dimensional measurements at the nanoscale will be addressed.

Keywords

3D-micrometrology, nanometrology, metrological traceability, standards, measurement uncertainty

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IMEKO-TC14-2013-PL-04.pdf

DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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