NON-CONTACT OPTICAL METROLOGY FOR AUTOMATED IN-PROCESS INSPECTION OF MACHINED SURFACES

Wojciech Kaplonek, Czeslaw Lukianowicz

Abstract

This work presents a concise review of selected issues related to non-contact optical metrology in applications where automated in-process inspection is involved. A brief description of the in-process inspection and applicable procedures were presented. A laser method based on analysis of scattered light was elaboratedin greater detail. In addition to the above, a short review of selected technical solutions in a form of an experimental and commercially manufactured measurement systems was presented. This review concentrates on describing of the most important metrological parameters, principles of operation and areas of applications of the aforementioned measurement systems. In the final part of the work a subjective selection of literature references was listed.

Keywords

optical metrology, laser scatterometry, inprocess inspection, machined surfaces, surface texture

Download

IMEKO-TC14-2013-15.pdf

DOI

-

IMEKO TC

TC14 - Measurement of Geometrical Quantities

Back to the proceedings