FAST INTEGRAL OPTICAL ROUGHNESS MEASUREMENT OF SPECULAR REFLECTING SURFACES IN THE NANOMETER RANGE

S. Patzelt, F. Horn, G. Goch

Abstract

A fast optical roughness measuring device with a compact design is presented. The measuring principle is based on double scattering of coherent light. The measurement results in an integral statistical roughness value like Ra or Rq according to ISO 4287. It is valid for the illuminated surface area with diameters between 0.5 mm and 10 mm at a resolution of about 1 nm (Ra-value). A simulation model of the optical roughness measuring process based on the Huygens-Fresnel approximation was implemented. The simulation tool enables to investigate potential improvements of the measuring method without expensive and time consuming experiments.

Keywords

Roughness, doubly scattered laser light, speckle correlation, simulation

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PWC-2006-TC2-006u.pdf

DOI

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IMEKO TC

TC2 - Photonics

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