ACCURATE DETERMINATION OF SPRING CONSTANT OF ATOMIC FORCE MICROSCOPE CANTILEVER AND COMPARISON WITH OTHER METHODS

Min-Seok Kim, Jae-Hyuk Choi, Yon-Kyu Park

Abstract

We present an AFM cantilever calibration system: Nano Force Calibrator (NFC), which can provide accurate spring constant calibrations with traceability to SI. Two types of commercial beam-shaped AFM cantilevers (contact and tapping mode) are investigated using the NFC. Uncertainty analysis reveals that the uncertainty of present method is less than 1%. In addition, comparison between other famous calibration methods (dimensional, cantileveron- cantilever, and Sader method) and the NFC method is performed to assess the uncertainties of other three methods. From the comparison results, we estimate that the uncertainties of dimensional, cantilever-on-cantilever, and Sader method are around 10-15%, 10%, and 15-40%, respectively.

Keywords

atomic force microscopy, calibration, cantilever, spring constant

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PWC-2006-TC3-019u.pdf

DOI

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IMEKO TC

TC3 - Measurement of Force, Mass, Torque, and Gravity

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