PRESSURE SENSOR WITH SI₃N₄ DIAPHRAGM AND OPTOELECTRONIC SENSING

P. Beneš, F. Matejka, R. Vrba, V. Kolarík

Abstract

Sensitive pressure sensor with nitride membrane and optoelectronic read-out system is described. Measured pressure is transformed into thick layer nitride membrane deflection. Nitride membrane serves as a mirror for laser beam and can move reflected laser mark. Mark’s position is sensed using position sensing device – fotolateral diode. Diode double current signal is amplified and conditioned digitally by ADuC 812 microcomputer. This one chip microcomputer provides an IEEE 1451.2 interface.

Keywords

pressure, nitride membrane, optoelectronic, standard IEEE 1451

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IMEKO-TC4-2001-065.pdf

DOI

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IMEKO TC

TC4 - Measurement of Electrical Quantities

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