SIO<sub>2</sub>-P<sub>2</sub>O<sub>5</sub> THIN-FILM HUMIDITY SENSOR: METROLOGICAL CHARACTERIZATION
Abstract
A prototype of humidity sensor, based on a solgel ceramic compound of phosphorous pentoxide P2O5 and silica SiO2, is presented. The sensing principle is based on the high affinity between phosphorous pentoxide and water: the frequency spectrum of the electrical impedance varies according to humidity with remarkable sensitivity. The silica basis allows the sensing element to be deposed on a oxidized silicon chip substrate for microsensor applications. The sol-gel production allows the sensing element to be easily developed as thin-film for fast time response. Design criteria and preparation procedure of the material, metrological characterization of the sensing element, and preliminary response tests of the sensor prototype are reported. Experimental results show the sensing element to be promising for a high-sensitive humidity low-temperature microsensor.
Event details
- Event
- TC4 Symposium 2001
- Technical Committee
- TC4
- Place
- Lisbon, PORTUGAL
- Time
- 13 September 2001 - 14 September 2001