A SILICON FLOW SENSOR FOR HIGHLY ACCURATE MASS FLOW MEASUREMENT
Abstract
We describe a thermal, silicon integrated, mass flow sensor for highly accurate mass flow measurements over a large dynamic range. Offset-drift is completely eliminated by application of the VanPutten-ADM method. The method is illustrated using air. The total measurement uncertainty is typically < 1% of reading, with a turndown larger than 1:1000.
Event details
- Event
- FLOMEKO 2000
- Technical Committee
- TC9
- Place
- Salvador, Bahia, BRAZIL
- Time
- 4 June 2000 - 8 June 2000