CALIBRATION OF LOW-FORCE STYLUS PROBES

Lutz Doering, Erwin Peiner, Michael Balke, Uwe Brand

Abstract

Traceable measurement of micro forces involved during stylus profiling is described. For this purpose two methods based on a transferable cantilever-type force standard were developed using the cantilever deflection and the output voltage of an integrated piezoresistive strain gauge. Force calibration was performed with commercial stylus instruments in the range of 10 - 200 µN.

Keywords

micro force calibration standard, stiffness artefact, load cell, stylus instrument

Download

PWC-2006-TC3-053u.pdf

DOI

-

IMEKO TC

TC3 - Measurement of Force, Mass, Torque, and Gravity

Back to the proceedings