THERMO-MECHANICAL MATERIAL CHARACTERIZATION OF PHTOTORESISTS WITH HIGH ASPECT RATIO

J. Vogel, H.-J. Feige, J. Saupe, G. Grützner, J. Grimm

Abstract

MEMS made of photosensitive polymers offer new functionalities and applications in the micro world. Additionally to the new materials and advanced technologies the analysis of the thermo-mechanical material properties is required to ensure reliability and lifetime. Under this point of view, an uniaxial micro tensile measuring system has been developed to determine stress-strain-curves, Young’s modulus or Poisson’s ratio. The results will be shortly compared with those of Dynamic-Mechanical Analysis (DMA).

Keywords

photosensitive polymers, material properties, microtensile test by DIC, DMA

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IMEKO-YSESM-2014-031.pdf

DOI

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IMEKO TC

TC15 - Experimental Mechanics

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