Determination of Uncertainty of Thickness Measurement of Thin Layers in Manifacient's Method

Jaroslaw Makal

Abstract

In this paper a procedure to determine the uncertainty of thickness measurement of thin layer is presented. The spectrophotometer method uses the spectrum of light transmission and some dependences between interference extremes and thickness of thin layer. The final result has been achieved by using a method recommended by Guide to the Expression of Uncertainty in Measurement. The standard uncertainty has been estimated by approach, called type B, which is based on manufacturer?s specification of spectrophotometer, experience in reading of results on transmission spectrum and literature data.

Keywords

uncertainty, thin layer, correlated variables

Download

IMEKO-TC7-2002-014.pdf

DOI

-

IMEKO TC

TC7 - Measurement Science

Back to the proceedings