DEFLECTOMETRIC PROFILER WITH SMALL BEAM SIZE USING A COMMERCIALLY AVAILABLE AUTOCOLLIMATOR

Youichi Bitou, Yohan Kondo

Abstract

The special resolution of the angle-based deflectometric surface profiler has been improved by introducing a novel null instrument. Proposed null instrument is simple, inexpensive, and has fast response time. High accuracy flatness measurement for low reflective surface has been successfully demonstrated with 1 mm laser beam spot size. The repeatability of the surface form measurement is better than ±0.6 nm.

Keywords: flatness, metrological instrumentation, surface form measurement, deflectometry, autocollimator
Download: IMEKO-TC14-2014-03.pdf
DOI: -
IMEKO TC: TC14 - Measurement of Geometrical Quantities

Event details

Event: TC14 LMPMI Symposium 2014
Technical Committee: TC14
Place: Tsukuba, JAPAN
Time: 3 September 2014 - 5 September 2014
Website: http://www.lmpmi2014.jp/

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