VERSATILE APPLICATIONS OF LASER FOCUS PROBES IN PRECISION MEASUREMENT TECHNOLOGY

Rostyslav Mastylo, Thomas Froehlich, Eberhard Manske

Abstract

Big challenges in precision measurement technology nowadays lead to the creation and improvement of a big variety of optical and tactile probes. This development concerns a nanosensor system on the basis of a non-contact laser focus probe (base sensor) which presents high resolution and low uncertainty. Optical and mechanical probing methods are combined on the basis of a laser focus sensor, thus allowing the combination of various interactions between sensor and specimen. For these purposes, the deflection of the probing sensor (cantilever or stylus) is measured directly without contact using the laser beam of the focus sensor. The significant advantage of the developed nanosensor system results from its modularity and versatility. Scanning laser focus sensors are a viable alternative enabling the measurement of non-periodic features. Severe limitations are imposed by the diffraction limit determining the edge location accuracy. A rigorous model for the simulation of the diffraction of three-dimensional focussed optical beams from line space patterns has been developed and applied to improve the edge detection accuracy of a laser focus sensor. The validation of this method is realised by means of an AFM part of the nanosensor system. <BR />Moreover, the possibility of using the laser focus senor not only for precision measurements, but also for the direct generation of precision nanostructures by means of lithography can be shown. Here, compared with classical lithography the goal is to ensure the capability of processing freeform structures on tilted surfaces.

Keywords

nanosensor, lithography, laser focus probe

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DOI

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IMEKO TC

TC14 - Measurement of Geometrical Quantities

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